Research on Low Power Sigma-Delta Interface Circuit used in Capacitive Micro-accelerometers

A Mixed-Signal Low-Noise Sigma-Delta Interface IC for Integrated Sub-Micro-Gravity Capacitive SOI Accelerometers

A 62μA Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

Capacitive accelerometers [1] have advantages such as zero static bias current, the capability of high sensitivity, and excellent thermal stability, making their use in low-power applications attractive. In this paper, an interface ASIC designed for a capacitive 3-axis micro-accelerometer [2] is presented. The die area and power dissipation are reduced by using time-multiplexed sampling and dut...

Micro-gravity capacitive silicon-on-insulator accelerometers

In this paper, the implementation and characterization of high-sensitivity in-plane capacitive micro-gravity silicon-on-insulator (SOI) accelerometers with the readout circuitry are presented. The devices were implemented in 50 μm thick SOI substrates using a two-mask dry-release process. The fabricated accelerometers were interfaced to a low-noise low-power reference-capacitor-less switched-ca...

Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors

MEMS capacitive sensors, such as pressure sensors, accelerometers and gyroscopes have been one of the most successful examples of microsystem technology. They are routinely used in many applications; the most important being automotive safety systems. These sensors are typically openloop and have low to medium performance specifications. Recently, there has been an emerging requirement for high...

A Micropower -Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

In this paper, a micropower interface IC for a capacitive 3-axis micro-accelerometer is presented. The IC is implemented in a 0.25m CMOS process. The fully-integrated sensor interface is based on a sensor front-end that operates mechanically in an open-loop configuration and converts the acceleration signals directly into the digital domain, thus avoiding the use of separate analog-to-digital c...